Duty Factor (%)

T1 & T2

(˚C)

T3

(˚C)

Maximum Temperature (˚C)

Maximum Deformation

(microns)

Frequency Detuning

(kHz)

3

25

25

25.73

2.60

−1.230

5

25

25

26.22

4.34

−2.050

7

25

25

26.71

6.07

−2.872

10

25

25

27.44

8.68

−4.104