| Sample | Temperature (˚C) | Carrier Gas (sccm) | Pulse (s) | Purge (s) | ||||||
| TMA | TDMAHf | H2O | TMA | TDMAHf | H2O | TMA | TDMAHf | H2O | ||
| Al2O3 | 370 | 150 | - | 200 | 0.1 | - | 0.1 | 4.0 | - | 6.0 |
| HfO2 | 370 | - | 100 | 150 | - | 1.6 | 0.1 | - | 5.0 | 1.0 |