Sample

Composition (At %)

Sub cycles

Super

cycles

Growth Rate (nm/cycle)

Al

Hf

Al₂O₃

HfO₂

AHO[1/1]

63

37

1

1

300

0.12

AHO[1/2]

43

57

1

2

200

0.14

AHO[1/3]

33

67

1

3

140

0.13

AHO[1/4]

21

79

1

4

110

0.13