|
| 28 nm UTBB of Tsoi = 7 nm [6] | Intel 22 nm Tri-Gate FinFET [7] [8] | ||
| NMOS | PMOS | NMOS | PMOS | |
| ION (µA/µm) | 1070 | 610 | 1260 @ 0.8 VDD | 1100 @ 0.8 VDD |
| IFF (nA/µm) | 16 | 30 | 100 | |
| DIBL (mV/V) | 90 - 95 | 90 - 95 | 46 | 50 |
| SS (mV/dec) | 85 - 90 @ 1 V VDD | 69 | 72 | |