|
|
28 nm UTBB of Tsoi = 7 nm [6] |
Intel 22 nm Tri-Gate FinFET [7] [8] |
||
| NMOS |
PMOS |
NMOS |
PMOS |
|
| ION (µA/µm) |
1070 |
610 |
1260 @ 0.8 VDD |
1100 @ 0.8 VDD |
| IFF (nA/µm) |
16 |
30 |
100 |
|
| DIBL (mV/V) |
90 - 95 |
90 - 95 |
46 |
50 |
| SS (mV/dec) |
85 - 90 @ 1 V VDD |
69 |
72 |
|