| Parameters | Value |
| Ag pwer | 40 W |
| Background pressure | 4.8 × 10−6 torr |
| Working pressure | 7.0 × 10−6 torr |
| Target-substrate distance | 10 cm |
| Substrate temperature | Room temperature |
| Thickness | 100 nm |
| Ar flow rate | 35 sccm |