| Sample # | Beam type | with Al | after Al removal | ||
| f0 (Hz) | Q | f0 (Hz) | Q | ||
| 1 | Si/Porous Si | 5198.4 | 1529 |
|
|
| 2 | Si | 5471.6 | 2880 | 5464.1 | 3214 |
| 3 | Si | 5567.2 | 2930 |
|
|
| 4 | Si | 5501.6 | 3236 |
|
|
| 5 | Si | 5334.6 | 2540 |
|
|
| 6 | Si | 5366.4 | 3157 |
|
|
| 7 | Si | 5442.3 | 2474 | 5434.4 | 2860 |
| Mean value | Si | ≈5447 | ≈2870 |
|
|