S.N.

Mode

Substrate

Surface height

(Rz) nm

Surface roughness

(Ra) nm

Route mean square roughness (Rq) nm

1.

Contact mode

glass

98.91

20.54

22.17

2.

silicon

115.56

23.78

29.27

3.

Dynamic mode

glass

76.67

14.98

18.62

4.

silicon

105.22

21.16

28.13