Structure

Sensitivity (V/W)

Resistance (kΩ)

Thermocouples (µm)

Absorber (µm)

Membrane (µm)

C_31

82

31

800

375 × 375

1400 × 1400

C_21

63

15

400

325 × 325

1035 × 1035

R_31

37

31

800

705 × 280

1305 × 1385

R_21

25

15

400

600 × 325

1035 ×0890