Laser Energy E (J) ± 10%

Mean Irradiance (W∙cm−2) × 1012

Depth of Exposure µm × 10−1

Si3N4 Window Used

0.9

0.095

Yes

1.8

0.17

Yes

6

0.21

No

2.9

0.225

Yes

0.99

0.237

Yes

2

0.27

No

17

7

0.29

No

6.3

0.33

No

18

0.34

No

23

0.4

No

6.8

0.41

No