Laser Energy E (J) ± 10%

Mean irradiance (W∙cm⁻²) × 10¹²

Depth of Exposure µm × 10⁻¹

Si₃N₄ Window Used

1.6

6.4

0.8

Yes

2

8.5

1.2

Yes

1.2

5.8

1.8

Yes

1.6

6.8

0.9

Yes

0.8

1.7

2.8

Yes