Laser Energy E (J) ± 10%

Mean Irradiance (W∙cm⁻²) × 10¹²

Depth of Exposure µm × 10⁻¹

Si₃N₄ Window used

7.6

19.3

1.2

Yes

5.8

14.7

1

Yes

3.7

9.4

0.8

Yes

1.4

5.6

1.1

No

6.8

27.3

2

No

5.9

23.8

1.8

No

5

21

1.6

No

4.5

19

1.6

No