Laser Energy E/(J) ± 10% | Mean irradiance (W∙cm−2) ×1012 | Depth of Exposure µm × 10−1 | Si3N4 Window used |
1.98 | 4.2 | 0.5 | Yes |
2.1 | 4.4 | 0.7 | Yes |
302 | 6 | 1.4 | Yes |