| name | index | tolerance |
| Z1 axis | Displacement | 100 mm |
| Straightness accuracy | 0.01 mm | |
| Positioning accuracy | 0.02 mm | |
| Repeated positioning accuracy | 0.01 mm | |
| Load | 30 kg | |
| Z2 axis | Displacement | 100 mm |
| Straightness accuracy | 0.01 mm | |
| Positioning accuracy | 0.02 mm | |
| Load | 30 kg | |
| X axis | Displacement | 300 mm |
| Straightness accuracy | 0.01 mm | |
| Load | 30 kg | |
| Z1, Z2 axis | Parallelism | 0.02 mm |
| X, Z1 axis | Verticality | 0.02 mm |
| X, Z2 axis | Verticality | 0.02 mm |