| Parameters | Systematic (cm) | Random (cm) | ||||
| Direction | L/R | S/I | A/P | L/R | S/I | A/P |
| Inter-# setup | 0.04 | 0.04 | 0.07 | 0.08 | 0.07 | 0.08 |
| Intra-# motion | 0.08 | 0.08 | 0.08 | 0.11 | 0.13 | 0.14 |
| Matching | 0.02 | 0.03 | 0.02 | 0.06 | 0.07 | 0.07 |
| Mechanical | 0.06 | 0.15 | 0.08 | 0.01 | 0.025 | 0.025 |
| Combined ∑2 | 0.01 | 0.03 | 0.01 | 0.02 | 0.02 | 0.03 |
| ∑/σ | 0.11 | 0.17 | 0.13 | 0.15 | 0.17 | 0.18 |
| PTV Margin | 0.35 | 0.51 | 0.41 | |||