| No. | Si (y) | Ge (1-x-y) | Sn (x) | Substrate | aBragg (Å) | aVegard (Å) | ∆a (Å) |
| 1 | 0.08 | 0.85 | 0.07 | Sapphire | 5.70 | 5.59 | 0.11 |
| SiO2 | 5.69 | 5.59 | 0.10 | ||||
| 2 | 0.26 | 0.71 | 0.03 | Sapphire | 5.62 | 5.54 | 0.09 |
| SiO2 | 5.62 | 5.54 | 0.08 | ||||
| 3 | 0.12 | 0.84 | 0.04 | Sapphire | 5.67 | 5.59 | 0.09 |
| Silicon | 5.66 | 5.59 | 0.08 | ||||
| 4 | 0.53 | 0.45 | 0.02 | Sapphire | 5.55 | 5.48 | 0.07 |
| Silicon | 5.54 | 5.48 | 0.06 | ||||
| - | 0 | 1 | 0 | N/A (bulk) | 5.66 | 5.66 | 0 |