Substrate Material

a (A)

ε (Anatase) (%)

ε (Rutile) (%)

Approx. Cost^a (USD/cm²)

Al₂O₃

4.759213^b

20.54^c

3.51

2.17

GaAs

5.65325^d

33.09^d

18.69

13.28

LaAlO₃

5.3646^e

29.51^e

21.01

14.22

LaSrAlO₄

3.75664^f

0.61^f

22.19

129.00

Si

5.4307^g

30.31^h

15.19

2.30

SiO₂

4.912ⁱ

23.20ⁱ

7.56

3.19

SrTiO₃

3.905268^j

3.72^k

15.74

119.80

Ti

2.95111^l

28.08^m

55.51

45.01