Sample | Composition (at. %) | ||||||
C | N | O | Pt | Si | Ti | S | |
TiN (36 nm) | 58.8 | 6.3 | 23.3 | - | 2.5 | 7.1 | 1.8 |
K36 | 75.9 | 1.8 | 15.4 | 0.4 | 1.2 | 4.9 | >0.1 |
K18 | 54.3 | 5.6 | 26.5 | 0.9 | 0.2 | 12.3 | >0.1 |