Sample

Composition (at. %)

C

N

O

Pt

Si

Ti

S

TiN (36 nm)

58.8

6.3

23.3

-

2.5

7.1

1.8

K36

75.9

1.8

15.4

0.4

1.2

4.9

>0.1

K18

54.3

5.6

26.5

0.9

0.2

12.3

>0.1