| S. No. | Parameters | Variation | % RSD |
| 1. | Time from application to development | 0 min | 1.465 |
| 30 min | 1.111 | ||
| 60 min | 0.759 | ||
| 2. | Time from development to scanning | 0 min | 1.477 |
| 30 min | 1.464 | ||
| 60 min | 0.879 | ||
| 3. | Scanning wavelength | 225 nm | 0.614 |
| 224 nm | 0.942 | ||
| 226 nm | 0.858 |