S. No. | Parameters | Variation | % RSD |
1. | Time from application to development | 0 min | 1.465 |
30 min | 1.111 | ||
60 min | 0.759 | ||
2. | Time from development to scanning | 0 min | 1.477 |
30 min | 1.464 | ||
60 min | 0.879 | ||
3. | Scanning wavelength | 225 nm | 0.614 |
224 nm | 0.942 | ||
226 nm | 0.858 |