Scanning

patterns

Variation Sources

(%) Contribution

Measured HD

Predicted HD

Measured HW

Predicted HW

Linear

P

78.20

71.10

42.91

52.56

SS

20.69

27.23

48.33

45.12

P*SS

0.12

0.11

0.06

0.61

Error

0.98

1.56

8.70

1.71

Sinusoidal

P

45.27

45.80

15.61

24.01

SS

50.11

51.53

80.43

73.14

P*SS

1.44

0.34

1.52

1.71

Error

3.18

2.33

2.45

1.13

Triangular

P

51.15

59.35

10.42

22.83

SS

41.18

35.32

86.31

75.76

P*SS

3.60

2.62

0.39

0.17

Error

4.07

2.71

2.87

1.23

Trochoid

P

58.20

61.06

22.65

23.22

SS

32.48

29.56

73.07

76.29

P*SS

1.06

0.81

1.05

0.03

Error

8.26

8.57

3.23

0.45