| Density [kg/m3] | Young’s modulus [GPa] | Poisson’s ratio |
Aluminum plate | 2680 | 70.6 | 0.33 |
Electrode plate | 6900 | 100 | 0.35 |
Piezoelectric material | 8400 | 132 | 0.30 |
γε = 2.213 × 10−9 [F/m], d31 = −3.7 × 10−12 [m/V] |