| Heat treatment | Thickness (nm) | d (cm−3 × 1020) | ρ (Ωcm × 10−4) | μ (cm2/V.S) | |||
| ITO | FTO | ITO | FTO | ITO | FTO | ||
| Before annealing | 300 | −1.44 | −2.25 | 14.32 | 2.63 | 3.8 | 10.5 |
| 500 | −3.27 | −6.19 | 6.44 | 3.12 | 29.6 | 32.3 | |
| 600 | −2.18 | −3.03 | 8.87 | 5.45 | 32.1 | 37.7 | |
| Annealing at 300˚C | 300 | −5.30 | −4.24 | 4.19 | 2.14 | 28.1 | 68.5 |
| 500 | −5.80 | −1.93 | 5.52 | 14.23 | 19.5 | 38.4 | |
| 600 | −6.36 | −0.01 | 4.40 | 28.8 | 17.3 | 22.2 | |
| Annealing at 400˚C | 300 | −4.69 | −0.04 | 3.75 | 28.2 | 35.4 | 173.9 |
| 500 | −6.05 | −4.47 | 3.68 | 5.16 | 17.9 | 27.1 | |
| 600 | −5.03 | −9.01 | 5.69 | 3.36 | 10.8 | 17.2 | |