Distance mm

Substrate rpm

Current A

Carrier gas flow Lit./Min.

Power flow rate Gms./Min.

Thickness

µm

Predicted values µm

% Variation

100

200

350

25

40

312.54

289.00

7.53

90

175

375

35

45

178.32

197.79

10.92

80

190

425

35

40

322.89

358.41

9.91