| Components | Material | Size | |
| Base | Polyimide | 15 × 2 × t0.05 mm | |
| Thermocouple | Chromel, Alumel | 50 | |
| Lead wire | Constantan | 50 | |
| Sensor’s pitch | - | 3 mm | |
| Heater | Cu-Ni alloy | 6.3 × 2.8 mm (120 Ω) | |