Ni film | Ethaline | Reline | Ethaline +en | Reline +en | Ethaline +acac | Reline +acac |
% Current efficiency | 100 | 70 | 54 | - | 37 | - |
Rate of deposition | 24.2 ng/s | 12 ng/s | 10 ng/s | - | 6 ng/s | - |