| Source of Errors | PSD1 band-passed error (RMS) | |
| Design error | 0.0000 nm | |
| Fabrication error | Substrate error | 0.6472 nm |
| Pattern distortion error | 0.3359 nm | |
| Duty-cycle error | 0.0000 nm | |
| Etching depth error | 0.5711 nm | |
| Alignment error | decenter | 0.0031 nm |
| tilt | 0.0012 nm | |
| RSS Errors | 0.9262 nm | |