Distance mm | Substrate rpm | Current A | Carrier gas flow Lit./Min. | Power flow rate Gms./Min. | Thickness µm | Predicted values µm | % Variation |
100 | 200 | 350 | 25 | 40 | 309.00 | 342.92 | 9.89 |
90 | 175 | 375 | 35 | 45 | 428.00 | 476.04 | 10.09 |
80 | 190 | 425 | 35 | 40 | 562.00 | 508.72 | 9.48 |