Distance mm

Substrate rpm

Current A

Carrier gas flow Lit./Min.

Power flow rate Gms./Min.

Thickness

µm

Predicted values µm

% Variation

100

200

350

25

40

309.00

342.92

9.89

90

175

375

35

45

428.00

476.04

10.09

80

190

425

35

40

562.00

508.72

9.48