Distance mm | Substrate rpm | Current A | Carrier gas flow Lit./Min. | Power flow rate Gms./Min. | Hardness µm | Predicted values µm | % Variation |
100 | 200 | 350 | 25 | 40 | 4.89 | 5.26 | 7.09 |
150 | 300 | 450 | 35 | 30 | 4.96 | 4.46 | 10.14 |
160 | 225 | 325 | 25 | 30 | 5.48 | 6.05 | 9.46 |