Region

Pits (μm)

V-H line (μm)

W defect (μm)

Vacancy-type

16.5 ± 1.9

632.2 ± 62.0

88.7 ± 16.2

OISF

11.0 ± 1.4

149.7 ± 42.4

60.1 ± 11.9

Defect-free

13.6 ± 1.3

－

－

Interstitial-type

13.9 ± 2.1

374.5 ± 61.5

68.5 ± 13.1