| RC Ge (atomic fraction) | RSM Ge (atomic fraction) | TEM Ge (atomic fraction) |
| 0.1887 | 0.1838 | 0.1635 |
| 0.1870 | 0.1838 | 0.1616 |
| 0.1897 | 0.1836 | 0.1592 |
| 0.1888 | 0.1840 | 0.1570 |
| 0.1879 | 0.1839 | 0.1442 |
| 0.1883 | 0.1837 | 0.1721 |
| 0.1885 | 0.1837 | 0.1552 |
| 0.1881 | 0.1836 | 0.1668 |
| 0.1878 | 0.1838 | 0.1744 |
| 0.1883 | 0.1838 | 0.1439 |
| Average × KRC = 0.1833 Stdev = 0.0007 | Average × KRSM = 0.1792 Stdev = 0.0001 | Average × KTEM/EDS = 0.1631 Stdev = 0.0105 |