| Resolution | 178 eV at Mn Kα |
| Window Thickness | 12.7 μm Be |
| Rating | 50 kV, 40 μA maximum power of the tube 2 W |
| Beam diameter | 7 mm |
| Filter | Element analysis |
| Ag excitation source | Sb, Sn, Cd, Pd, Ag, Mo, Nb, Zr, Sr, Rh, Bi, As, Se, Au, Pb, W, Zn, Cu, Re, Ta, Hf, Ni, Co, Fe, Mn, Cr, V, Ti, Th, and U |
| Sandwich of Al, Ti and Mo | Ba, Sb, Sn, Cd, Pd, Ag |
| Cu Filter | Cr, V, Ti, Ca, K |
| No Filter | Al, P, Si, Cl, S, Mg |