Layer

Doping (cmāˆ’3)

Distribution mode

p-sub

1 × 1015

uniform

p-well

1 × 1018

Gaussian

n-well

1 × 1017

Gaussian

p+

1 × 1019

Gaussian

pāˆ’

1 × 1018

Gaussian

n+ contact

1 × 1019

Gaussian

p+ contact

1 × 1019

Gaussian