| Layer | Doping (cmā3) | Distribution mode |
| p-sub | 1 × 1015 | uniform |
| p-well | 1 × 1018 | Gaussian |
| n-well | 1 × 1017 | Gaussian |
| p+ | 1 × 1019 | Gaussian |
| pā | 1 × 1018 | Gaussian |
| n+ contact | 1 × 1019 | Gaussian |
| p+ contact | 1 × 1019 | Gaussian |