Tilt angle Mg implanted GaN MISFET

Threshold Voltage

Vth (V)

Maximum Transconductance gmmax (mS/mm)

Drain Current

Id (mA/mm)

(Vg ? Vth = 5 V, Vd = 5 V)

Mg dose: 1 × 1013/cm2

−6.5

73

225

Mg dose: 4 × 1013/cm2

−4

55

188

Mg dose: 8 × 1013/cm2

−3.5

40

106