Tilt angle Mg implanted GaN MISFET | Threshold Voltage Vth (V) | Maximum Transconductance gmmax (mS/mm) | Drain Current Id (mA/mm) (Vg ? Vth = 5 V, Vd = 5 V) |
Mg dose: 1 × 1013/cm2 | −6.5 | 73 | 225 |
Mg dose: 4 × 1013/cm2 | −4 | 55 | 188 |
Mg dose: 8 × 1013/cm2 | −3.5 | 40 | 106 |