Parameters

8 Ar

28 Ar

15 O₂

40 O₂

950 V

1250 V

Ar flux (sccm)

8

28

18

18

18

18

O₂ flux (sccm)

15

15

15

40

15

15

Beam voltage (V)

1250

1250

1250

1250

950

1250