| EC2216 | |
3# | 4# | |
Surface figure error before bonding (λ) | 0.009 | 0.012 |
Surface figure error one month after bonding (λ) | 0.016 | 0.025 |
Surface figure error after 24 h vacuum deflating at room temperature (λ) | 0.022 | 0.025 |
Surface figure error after three thermal cycles test (λ) | 0.038 | 0.040 |