Deposited metal oxide

Concentration (mol/lit)

Temperature (˚C)

ZnO

0.1

350

ZnO

0.1

400

ZnO

0.2

400

ZnO

0.3

400

25 wt% ZnO + 75 wt% In2O3

0.1

400

80 wt% ZnO + 20 wt% In2O3

0.1

400