Test | Test description | Result upon error in dose | Result upon shift error |
1 | HWHM upon error | Measured-theory ≈ 0.01% | Measured-theory ≈ 0.4 mm |
2 | Centroid upon error | 99.6% (i.e. −0.4% off) | −0.2 mm |
3 | 90% - 10% penumbra upon error | 1.11% | 1.7 mm |
4 | Do the passing rates with no error reach 100%? | Yes | Yes |
5 | Minimum criterion allowing 100% passing rate (in absence of errors) | 1.5% | 1.5 mm |
6 | Minimum error detectable at 100% rate (for γ-index criterion allowing 100% passing rate in absence of errors) | 3.0% for γ(1.5%, 1 mm) | 3.0 mm for γ(0.01%, 1.5 mm) |