| (a) no gap | DOP (µm) | BDW (µm) | Undercut (µm) | (b) with gap | DOP (µm) | BDW (µm) | Undercut (µm) |
| Min | 1493 | 971 | 154 | Min | 1167 | 713 | 360 |
| Max | 1612 | 1080 | 254 | Max | 1353 | 922 | 507 |
| Mean | 1542 | 1023 | 212 | Mean | 1253 | 822 | 422 |
| Standard deviation | 38 | 32 | 30 | Standard deviation | 43 | 42 | 39 |
| Relative error | 2% | 3% | 12% | Relative error | 3% | 3% | 7% |