| LG process parameters | Values |
| Sputtering current (A) | 5.0 |
| Impulse frequency (Hz) | 1000 |
| Laser wavelength (μm) | 10.64 |
| Groove depth (μm) | 0.05 |
| Groove width (μm) | 50 |
| Line density (line/mm) | 7 |