Author name

Generator dimension

Materials used

Generator configuration

Coupling mode

Input

Output

Application

Lu [36]

(5 × 1 × 0.4) mm

PZT-PIC 255

PZN-8% PT

Piezoelectric laminated generator

“31” coupling mode

Amplitude on seismic mass (µm) = 30

PZT-PIC 255

P = 0.64 µW

PZN-8% PT

P = 0.31 µW

MEMS

Roundy [7]

(17 × 3.6 × 0.38)

mm

PZT-5A

PZT-5H

Steel center shim

Brass center shim

Cantilevered Bimorphs

“31” coupling mode

Input Acceleration = 2.5 ms−2

Input Frequency = 120 Hz

375 µW from 1 cm 3 generator

Wireless transceiver

Erturk [37]

(50.8 × 31.8 × 0.52)

mm

-

Cantilever based energy harvester

-

Input frequency = 45.6 Hz

23.9 mW/g2 @ 35 KΩ

-

Lee [38]

(3000 × 1500 × 11)

µm

PZT, Si, SiO2, Ti/Pt

Cantilever type generator

“31” and “33” mode MEMS generator made by a silicon process

For “31” mode

Resonant frequency = 255.9 Hz

Operating Load = 150 KΩ

For “33” mode

Resonant frequency = 214 Hz

Operating Load = 510 KΩ

For “31” mode

P = 2.099 µW

Voc = 2.415 V

Vsh = 1.587 V

For “33” mode

P = 1.288 µW

Voc = 4.127 V

Vsh = 2.292 V

MEMS

Kim [39]

(53 × 31 × 6.6) mm

-

Cantilever beam piezoelectric generator

-

Input Acceleration = 0.2 ms-2

Input Frequency = 34.57 Hz

60 µW @ 27.6 KΩ

-