Author name

P (µW)

F (Hz)

A (ms−2)

M (g)

Volume (mm3)

Details

Tashiro [22]

36

6

1

780

-

Aluminum

Arakawa [23]

6

10

3.9

-

800

Glass

Mitcheson [24]

3.7

30

50

0.1

750

Silicon