C_Q

J_gas

m (total)

S

heat capacity matrix

coefficient matrix of heat conduction

gas specific heat capacity

wafer specific heat capacity

wafer mass

heat transfer area

norm bounded uncertainties

2.80 kw・sec・˚C

0.55 kw・m²・˚C

1.355 kJ・kg・˚C

0.84 kJ・kg・˚C

405.8 g

1.54 m²

0.1 sin(t) × 10⁻³ kJ・s⁻¹