Sample materials | Photoresist on Silicon | ||||
Spectrophotometry (µm) | 1.085 | 1.272 | 1.477 | ||
Ellipsometry (µm) | 1.088 | 1.279 | 1.481 | ||
Film thickness analysis (HCF) (µm) | 1.083 | 1.274 | 1.479 | ||