Nitrogen Gas (%)

Power

(W)

Pressure (mT)

Thickness (nm)

Atomic percentage

N/Ga Ratio

Time (hrs.)

Ga (%)

N (%)

O (%)

0

40

5

175.63

28.3

5.48

22.04

0.19

1

25

40

5

74.3

21.03

4.49

30.84

0.21

1

33

40

5

146.43

13.7

3.63

25.58

0.27

2

33

40

10

146

35.02

7.2

45.47

0.21

2

33

40

20

29.63

7.39

2.13

14.05

0.28

2

33

40

30

16.9

3.45

1.63

7.88

0.47

2

33

50

20

37.58

10.35

2.32

18.95

0.22

2

33

50

30

18.1

5.25

1.86

10.79

0.35

2

40

40

10

35.45

8.69

2.85

16.41

0.33

1

40

40

10

64.72

8.62

3.22

17.31

0.37

2

60

40

15

15.42

6.98

3.51

14.89

0.5

1

60

40

15

34.05

8.48

3.44

16.07

0.41

2

60

15

15

7.32

2.69

2.15

6.21

0.80

3

100

15

15

3.1

1.15

2.88

5.84

2.5

3

100

40

15

22.22

4.07

2.99

8.89

0.73

2