Membrane structure | Al | SiO2/Al | SiO2/Al/SiO2 |
Pressure (Pa) | 0.8 | 0.5/0.8 | 0.5/0.8/0.5 |
Sputtering time (min) | 30 | 30/30 | 30/30/30 |
Sputtering power (W) | 200 | 200/200 | 200/200/200 |
Ar rate of flow (sccm) | 10 | 60/40 | 60/40/60 |
Temperature (˚C) | 150 | 200/150 | 200/150/200 |