Membrane structure

Al

SiO2/Al

SiO2/Al/SiO2

Pressure (Pa)

0.8

0.5/0.8

0.5/0.8/0.5

Sputtering time (min)

30

30/30

30/30/30

Sputtering power (W)

200

200/200

200/200/200

Ar rate of flow (sccm)

10

60/40

60/40/60

Temperature (˚C)

150

200/150

200/150/200