Antireflection coating on Si |
| Optimal thickness (nm) | Thickness Difference (TD) | Average Reflectance (%) |
SiO2 | 103 | 106 | 3 | 14.3 |
ZrO2 | 69 | 72 | 3 | 9.4 |
TiO2 | 58 | 58 | 0 | 15 |
Al2O3 | 85 | 88 | 3 | 9.2 |
SiNx (n = 1.8) | 81 | 85 | 4 | 9.1 |
SiNx (n = 2.2) | 68 | 72 | 4 | 10.8 |
SiO2/TiO2 | 103/58 | 103/58 | 0/0 | 2.3 |
SiO2/ZrO2 | 103/69 | 103/69 | 0/0 | 3.6 |
SiO2/Al2O3 | 103/85 | 95/78 | −8/−7 | 9.0 |
SiO2/SiNx (n = 1.8) | 103/81 | 110/89 | 7/8 | 2.0 |
SiO2/SiNx (n = 2) | 103/74 | 105/77 | 2/3 | 2.0 |
SiO2/SiNx (n = 2.2) | 103/68 | 100/66 | −3/−2 | 2.2 |