>0.3

>0.5

>1.0

>3.0

>5.0

>10.0 µm

Before

Unit 10

0

4

16

63

209

587

Unit 19

0

1

8

29

80

169

Unit 33

0

3

14

57

192

719

Unit 37

0

3

17

65

207

603

After

Unit 10

0

3

5

4

7

8

Unit 19

0

0

0

0

1

3

Unit 33

0

0

0

1

2

7

Unit 37

0

0

0

5

15

45