| Equipment | Range | Type |
| Pressure P2 | 0 - 500 [kPa] | FP101-B31-C20A*B (YOKOGAWA) |
| Pressure Pd | 0 - 200 [kPa] | FP101-A31-C20A*B (YOKOGAWA) |
| Flow rate | 0 - 200 [L/min (ANR)] | QFS-200 (TOKYO METER) |
| ITC 1 | 180 [mL] | ITC-0.2 (TOKYO METER) |