Barrier property

Functional group (R)

Cracks

H2O

O2

Uncoated

------------

--------

+

+ + +

I

TEOS

-OH

+ + +

+ +

+ + + + +

Ia

TEOS_LDHs

+ + +

+ + + + +

II

TEOS_DEMDS

-CH3

+ +

+ + + +

+ + + + + +

IIa

TEOS_DEDMS_LDHs

+ + + + +

+ + + + +

III

TEOS_APTES

-(CH2)3NH2

+

+ + + +

+ + + + + +

IIIa

TEOS_APTES_LDHs

+ + + + + +

+ + + + +

IV

TEOS_OTES

-(C7H14)CH3

+ + + +

+ + + +

+ +

IVa

TEOS_OTES_LDHs

+ + + + + +

+