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| Barrier property | |
|
|
| Functional group (R) | Cracks | H2O | O2 |
|
| Uncoated | ------------ | -------- | + | + + + |
| I | TEOS | -OH | + + + | + + | + + + + + |
| Ia | TEOS_LDHs | + + + | + + + + + | ||
| II | TEOS_DEMDS | -CH3 | + + | + + + + | + + + + + + |
| IIa | TEOS_DEDMS_LDHs | + + + + + | + + + + + | ||
| III | TEOS_APTES | -(CH2)3NH2 | + | + + + + | + + + + + + |
| IIIa | TEOS_APTES_LDHs | + + + + + + | + + + + + | ||
| IV | TEOS_OTES | -(C7H14)CH3 | + + + + | + + + + | + + |
| IVa | TEOS_OTES_LDHs | + + + + + + | + | ||