Step # | Time | Temp | O2 | Pressure | Remarks |
UOM | Min | ˚C | sccm | mbar | |
1 | 10 | 700 | 0 | 1060 | Boat-In |
2 | 10 | 750 | 0 | 200 | Heat-Up + Pump Down |
3 | 20 | 780 and 750 | 500 | 200 | Oxidation Anneal |
4 | 10 | 700 | 0 | 200 | Cool-Down |
5 | 10 | 700 | 0 | 1060 | Boat-Out |