| LP POCl3 | Remarks | ||||||
| Step # | Time | Temp | N2 | POCl3 | O2 | Pressure | |
| UOM | Min | ˚C | sccm | sccm | sccm | mbar | |
| 1 | 10 | 790 | 15,000 | Boat In | |||
| 2 | 8 | 765 | Heat-up + Pump Down | ||||
| 3 | 1 | 765 | 1000 | 50 | Stabilize + Purge + Pre-Ox | ||
| 4 | 5 | 765 | 430 | 110 | 350 | 50 | Deposition1 |
| 5 | 3 | 780 | 430 | 350 | 50 | Ramp up | |
| 6 | 5 | 780 | 430 | 90 | 350 | 50 | Deposition 2 |
| 7 | 3 | 800 | 430 | 350 | 50 | Ramp Up | |
| 8 | 5 | 800 | 430 | 80 | 350 | 50 | Deposition 3 |
| 9 | 10 | 820 | 5000 | 3000 | 200 | Drive-In | |
| 10 | 5 | 815 | 3000 | 0 | Cool-Down | ||
| 11 | 10 | 790 | 15,000 | Boat-Out | |||